148

S. Palleboina and K. Pallela

Fig. 11.2 a Motor gear fabrication. b Mechanical gear system

For Aerodynamic Controls: There are many MEMS fluidic sensors in the market

included with piezo-resistive pressure sensors, micro machined hot wires and shear

stress sensors allowed them to use for flexible bubble actuators, which affects rolling

movements of the wing. Apart from the above advantages, the actuators designed

using MEMS are power thrifty and hence they are efficiently used in wide range of

applications for the improvement of large aerodynamic performances [3].

Micromachining Process

Designing of MEMS involve various processing steps and a broad classification of

these steps are given below.

1.

Standard Integrated Circuit (IC) Process

• This method will be similar to that of IC fabrication

2.

Surface Micromachining

• This is an additive process

3.

Bulk Micromachining

• It is considered to be subtractive process

4.

Providing a dividing line and it can be blurred at times.

IC Process

The processing of an IC consists with the following steps: